Realization, Calibrations and Spatialization of ß-(Al)Ga2O3 UVC Photodetectors of Extreme Solar Blindness for Space Observations - Archive ouverte HAL Access content directly
Proceedings Year : 2022

Realization, Calibrations and Spatialization of ß-(Al)Ga2O3 UVC Photodetectors of Extreme Solar Blindness for Space Observations

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Abstract

There is a surge in interest for the ultra-wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and that a variety of methods have been shown to give high quality epitaxial growth. Amongst a whole range of potential applications (power/switching electronics, solar transparent electrodes, etc.) extreme solar blindness photodetectors in β-Ga2O3, the more stable monoclinic phase of Ga2O3, offer the most exciting perspectives for deep ultraviolet observations of the Herzberg continuum (200-242 nm) in Space. We present an overview of the complete realization process (epitaxy, photolithography, singulation and packaging), performances evaluation and spatialization of a series of β-(Al)Ga2O3 photodetectors developed (slight Al alloying to enhance ultraviolet response below 253 nm), space qualified and selected for flight on the INSPIRE-SAT 7 nanosatellite (launch planned in early 2023).
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Dates and versions

insu-03878382 , version 1 (29-11-2022)

Identifiers

  • HAL Id : insu-03878382 , version 1

Cite

Luc Damé, Pierre Maso, Lucile Conan, Clément Dias, Halima Ghorbel, et al.. Realization, Calibrations and Spatialization of ß-(Al)Ga2O3 UVC Photodetectors of Extreme Solar Blindness for Space Observations. International Frequency Sensor Association (IFSA) Publishing, pp.237-240, 2022, Sensors and Electronic Instrumentation Advances. Proceedings pf the 8th International Conference (SEIA' 2022), 21-23 September 2022, Corfou, Greece, 978-84-09-43854-9. ⟨insu-03878382⟩
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