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Journal articles

Submicron x-ray diffraction and its applications to problems in materials and environmental science

Abstract : The availability of high brilliance third generation synchrotron sources together with progress in achromatic focusing optics allows us to add submicron spatial resolution to the conventional century-old x-ray diffraction technique. The new capabilities include the possibility to map in situ, grain orientations, crystalline phase distribution, and full strain/stress tensors at a very local level, by combining white and monochromatic x-ray microbeam diffraction. This is particularly relevant for high technology industry where the understanding of material properties at a microstructural level becomes increasingly important. After describing the latest advances in the submicron x-ray diffraction techniques at the Advanced Light Source, we will give some examples of its application in material science for the measurement of strain/stress in metallic thin films and interconnects. Its use in the field of environmental science will also be discussed.
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Submitted on : Saturday, March 12, 2022 - 5:41:53 PM
Last modification on : Tuesday, May 24, 2022 - 3:28:34 PM

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N. Tamura, R. S. Celestre, A. A. Macdowell, H. A. Padmore, R. Spolenak, et al.. Submicron x-ray diffraction and its applications to problems in materials and environmental science. Review of Scientific Instruments, American Institute of Physics, 2002, 73, pp.1369-1372. ⟨10.1063/1.1436539⟩. ⟨insu-03607077⟩



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