Nanometer-scale Defect Detection Using Polarized Light

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https://hal-insu.archives-ouvertes.fr/insu-01333788
Contributor : Catherine Cardon <>
Submitted on : Sunday, June 19, 2016 - 3:13:25 PM
Last modification on : Tuesday, May 14, 2019 - 11:00:30 AM

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  • HAL Id : insu-01333788, version 1

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Pierre-Richard Dahoo, Philippe Pougnet, Abdelkhalak El-Hami. Nanometer-scale Defect Detection Using Polarized Light. ISTE Editions, 200 p., 2016, 10 1848219369. ⟨insu-01333788⟩

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