Non-Destructive Characterization by Spectroscopic Ellipsometry of Interfaces in Mechatronic Devices

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https://hal-insu.archives-ouvertes.fr/insu-01155342
Contributor : Catherine Cardon <>
Submitted on : Tuesday, May 26, 2015 - 2:47:23 PM
Last modification on : Tuesday, May 14, 2019 - 11:09:06 AM

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  • HAL Id : insu-01155342, version 1

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Pierre-Richard Dahoo, Malika Khettab, Jorge Linares, Philippe Pougnet. Non-Destructive Characterization by Spectroscopic Ellipsometry of Interfaces in Mechatronic Devices. Abdelkhalak El Hami et Philippe Pougnet. Embedded Mechatronic Systems 1. Analysis of Failures, Predictive Reliability, Elsevier, Chapter 2, 2015, 978-1-78548-013-3. ⟨insu-01155342⟩

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