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Non-Destructive Characterization by Spectroscopic Ellipsometry of Interfaces in Mechatronic Devices

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https://hal-insu.archives-ouvertes.fr/insu-01155342
Contributor : Catherine Cardon <>
Submitted on : Tuesday, May 26, 2015 - 2:47:23 PM
Last modification on : Tuesday, November 24, 2020 - 1:06:07 PM

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Pierre-Richard Dahoo, Malika Khettab, Jorge Linares, Philippe Pougnet. Non-Destructive Characterization by Spectroscopic Ellipsometry of Interfaces in Mechatronic Devices. Abdelkhalak El Hami et Philippe Pougnet. Embedded Mechatronic Systems 1. Analysis of Failures, Predictive Reliability, Elsevier, Chapter 2, 2015, 978-1-78548-013-3. ⟨10.1016/B978-1-78548-013-3.50002-4⟩. ⟨insu-01155342⟩

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